| SU-8: a low-cost negative resist for MEMS H Lorenz, M Despont, N Fahrni, N LaBianca, P Renaud, P Vettiger Journal of Micromechanics and Microengineering 7 (3), 121, 1997 | 1383 | 1997 |
| The" millipede"-nanotechnology entering data storage P Vettiger, G Cross, M Despont, U Drechsler, U Durig, B Gotsmann, ... IEEE Transactions on nanotechnology 1 (1), 39-55, 2002 | 1021 | 2002 |
| The “Millipede”—More than thousand tips for future AFM storage P Vettiger, M Despont, U Drechsler, U Durig, W Haberle, MI Lutwyche, ... IBM Journal of Research and Development 44 (3), 323-340, 2000 | 858 | 2000 |
| High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS H Lorenz, M Despont, N Fahrni, J Brugger, P Vettiger, P Renaud Sensors and Actuators A: physical 64 (1), 33-39, 1998 | 783 | 1998 |
| A cantilever array-based artificial nose MK Baller, HP Lang, J Fritz, C Gerber, JK Gimzewski, U Drechsler, ... Ultramicroscopy 82 (1-4), 1-9, 2000 | 517 | 2000 |
| Nanoscale three-dimensional patterning of molecular resists by scanning probes D Pires, JL Hedrick, A De Silva, J Frommer, B Gotsmann, H Wolf, ... Science 328 (5979), 732-735, 2010 | 382 | 2010 |
| Ultrahigh-density atomic force microscopy data storage with erase capability G Binnig, M Despont, U Drechsler, W Haeberle, M Lutwyche, P Vettiger, ... Applied Physics Letters 74 (9), 1329-1331, 1999 | 366 | 1999 |
| Millipede-a MEMS-based scanning-probe data-storage system E Eleftheriou, T Antonakopoulos, GK Binnig, G Cherubini, M Despont, ... IEEE transactions on magnetics 39 (2), 938-945, 2003 | 324 | 2003 |
| A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors HP Lang, R Berger, F Battiston, JP Ramseyer, E Meyer, C Andreoli, ... Appl. Phys. A 66 (7), S61-S64, 1998 | 299 | 1998 |
| Ultralow nanoscale wear through atom-by-atom attrition in silicon-containing diamond-like carbon H Bhaskaran, B Gotsmann, A Sebastian, U Drechsler, MA Lantz, ... Nature nanotechnology 5 (3), 181-185, 2010 | 267 | 2010 |
| Ultrahigh density, high-data-rate NEMS-based AFM data storage system P Vettiger, J Brugger, M Despont, U Drechsler, U Dürig, W Häberle, ... Microelectronic Engineering 46 (1-4), 11-17, 1999 | 250 | 1999 |
| High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications M Despont, H Lorenz, N Fahrni, J Brugger, P Renaud, P Vettiger Proceedings IEEE the tenth annual international workshop on micro electro …, 1997 | 249 | 1997 |
| Atomic force microscope cantilevers for combined thermomechanical data writing and reading WP King, TW Kenny, KE Goodson, G Cross, M Despont, U Dürig, ... Applied Physics Letters 78 (9), 1300-1302, 2001 | 247 | 2001 |
| Sequential position readout from arrays of micromechanical cantilever sensors HP Lang, R Berger, C Andreoli, J Brugger, M Despont, P Vettiger, ... Applied Physics Letters 72 (3), 383-385, 1998 | 232 | 1998 |
| VLSI-NEMS chip for parallel AFM data storage M Despont, J Brugger, U Drechsler, U Dürig, W Häberle, M Lutwyche, ... Sensors and Actuators A: Physical 80 (2), 100-107, 2000 | 227 | 2000 |
| Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist H Lorenz, M Despont, P Vettiger, P Renaud Microsystem Technologies 4, 143-146, 1998 | 215 | 1998 |
| Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications L Dellmann, S Roth, C Beuret, GA Racine, H Lorenz, M Despont, ... Sensors and Actuators A: Physical 70 (1-2), 42-47, 1998 | 195 | 1998 |
| Selective transfer technology for microdevice distribution R Guerre, U Drechsler, D Jubin, M Despont Journal of Microelectromechanical Systems 17 (1), 157-165, 2008 | 194 | 2008 |
| Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation WP King, TW Kenny, KE Goodson, GLW Cross, M Despont, UT Durig, ... Journal of Microelectromechanical Systems 11 (6), 765-774, 2002 | 177 | 2002 |
| Higher modes of vibration increase mass sensitivity in nanomechanical microcantilevers MK Ghatkesar, V Barwich, T Braun, JP Ramseyer, C Gerber, M Hegner, ... Nanotechnology 18 (44), 445502, 2007 | 171 | 2007 |
